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As blue and other color LEDs are becoming more and more
important, it is crucial to develop efficient p-type
contacts. P-type contacts are the metal
connections to the p-type semiconductor in the device.
They need to be transparent so that the light produced
by the LED can pass through them and be ohmic
(conductive) so that the electrons can power the device.
The contacts that we will be researching are
nickel-gold.
This project builds on previous research and will
correlate optical findings to their electrical
properties. The sheet resistance of the thin film
will be measured using TLM (transmission line method).
Transmission line method involves deposition of test
patterns onto thin films using photolithography and
measuring the resistivity between them.
Another
interesting study would be to find the upper limit of
annealing effect on a light emitting diode. |
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Semester Two Midterm Update 3/2/2005 |
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Practiced and hopefully perfected the photolithography
process
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Received training on the "Sputtering" machine so we
could complete multiple tests ourselves
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Completed successful deposit of 2 kÅ gold on our test
sample
-
Completed successful liftoff using acetone and
ultrasound.
- Attempted
first photolithography procedure on the real samples
from NIST
- This sample
was damaged by the acetone during the cleaning process
- Completed
photolithography process on second sample from NIST
- Attempt to
deposit 2kÅ Au on this sample failed due to a device
malfunction. The sputtering machine failed to
deposit the required amount of gold. This sample was
not ruined however.
Upcoming Activities:
- Research why
the sputtering machine failed
- Work to
deposit 2kÅ Au on all of the test samples from NIST
- Use the probe
station to measure resistivity
- Begin to
correlate this resistance data with previous optical
data
-
Write final
report
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Progress Update 12/3/2004 |
- Completed
deposition of 1u Au on test sample
- Attempt to
lift off gold film using acetone and ultrasound was
unsuccessful
- Researched
possible reasons for failed lift off; determined Au
should be deposited in a thinner coat and the lift
off should be attempted within 48 hours of
deposition
Upcoming Activities:
- Enhance
photolithography procedure to obtain better results
and make more samples
- Deposit 2kÅ
Au on new test samples and perform lift off
procedure of gold film
- Finish a
formal project proposal report including progress
made to date
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Progress Report 11/4/2004 |
- Mask for
test structures selected with appropriate CTLM
structures
- Established
a photolithography process
- Selection
and preparation of amorphous SiO2
substrate
with Ni/Au film
-
Photolithography complete for first test sample
with encouraging results.
- Received
CTLM analysis spreadsheet from Mike Ahrens
- Requested 1u
Au deposition from John Hudak
Upcoming Activities:
- Inspect
resulting CTLMs with optical microscopy
- Measure the
sheet resistance with probe station
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Progress Report 10/8/2004 |
- Preliminary
research and paper search
- Gained
access to the clean room
-
Familiarization with clean room equipment
- Received
photolithography test material (glass with metal
thin film deposited) from Mike Ahrens
- Robert,
Stewart and Matthew reviewed NIST research and LED
basics. The group also reviewed Robert's power
point presentation on optical characterization of
thin films.
Upcoming Activities:
- Deposit CTLM
patterns in "thick" gold (1 micron thick)
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