Dr. Ma's Research Projects

Department of Mechanical and Aerospace Engineering

North Carolina State University

Last updated Wed Feb 9 16:18:38 EST 2005

Professor Ma's research interests are in the areas of heat transfer, fluid dynamics and species transport as applied to growth of photonic semiconductor crystals. This research involves the analytical and numerical modelling of transport phenomena during various crystal growth processes in the presence of magnetic and electric fields. The modelling of these phenomena is extremely important for support of on-going experimental efforts in order to guide process optimization for the production of high-quality semiconductor ingots which serve as bases for optoelectronic devices. Materials of interest are photonic semiconductor crystals, namely, doped or alloyed III-V semiconductors, alloyed II-VI semiconductors, and high-purity silicon.

The quality of any semiconductor is directly related to the uniformity of its composition, or compositional homogeneity, because devices are produced on surfaces of thin wafers sliced from a semiconductor crystal. When only a few devices were fabricated on a wafer, large compositional deviations could be tolerated because the devices were large enough to see the local average. Even a small local compositional variation can lead to the malfunction of a device. With the recent growth in the marketplace and with the use of micro- and nano-scale devices, there is a critical need for compositional homogeneity. Therefore models which accurately predict the transport of species during crystal growth are needed in order to determine the optimal processes which minimize segregation in the photonic semiconductor. The development of such models are critically important for several reasons. (1) Currently, high-quality crystals of compound or alloyed semiconductors can be grown by molecular methods but their production rates are roughly one-thousand times smaller than those for bulk methods such as the Czochralski, Bridgman, vertical gradient freezing or floating-zone methods. Recent rapid advances in optoelectronics have led to a great demand for more and larger crystals, so that molecular methods cannot be used to produce the quantity suitable for future needs. (2) Current rejection rates of integrated circuits and optoelectronic devices are extremely high due to unacceptable compositional variations in the wafer. This has enormous economic consequences because the only way to determine whether a wafer is viable is to fabricate and test the entire device. (3) Because molten semiconductors are opaque and very high in temperature, experimental measurements of transport variables during growth are extremely difficult to obtain so that little data are available. With the essentially infinite number of possible combinations of controllable process parameters, an empirical trial-and-error search is not practical. Therefore, model predictions of the crystal's composition need to be compared with measurements of concentrations in wafers sliced from a crystal in order to guide process optimization.

The segregation of dopants during silicon or III-V crystal growth, and the segregation of species during alloyed III-V or alloyed II-VI crystal growth depend on the convective and diffusive transport of the components in the melt during crystal growth. Since molten semiconductors are excellent electrical conductors, externally-applied magnetic and electric fields are used to control the melt motion in order to improve the crystal's quality. Major objectives of our research are to understand, predict and control the segregation during various processes for different semiconductor materials. Our models provide accurate predictions of the unsteady species transport for the entire period of time needed to grow a crystal, and are used to systematically search over all possible combinations of controllable process parameters in order to determine the optimal processes which minimize segregation in the crystal.


ABSTRACTS

Vertical Bridgman Growth of III-V Semiconductor Crystals Using a Submerged Heater with Rotating Magnetic Fields
(in collaboration with the U.S. Air Force Research Laboratory, Hanscom AFB, MA)

Single crystals of doped and alloyed III-V semiconductors such as gallium-antimonide (GaSb) and gallium-aluminum-antimonide (GaAlSb) are extremely important for space-based imaging and hyperspectral imaging applications. These crystals are being grown by the vertical Bridgman process using a submerged heater. Rotating magnetic fields (RMFs) are being applied in order to control the convective species transport in the melt in order to minimize the segregation in the crystal. An RMF is a periodic transverse magnetic field which is produced by a number of magnet poles which are placed at equally-spaced azimuthal positions around the crystal-growth furnace. The magnet poles are connected to successive phases of a multiphase electric power source, and this arrangement produces a magnetic-field pattern which rotates in the azimuthal direction. Numerical models are being developed in order to complement experiments being conducted at the U. S. Air Force Research Laboratory at Hanscom AFB.

Vertical Gradient Freezing of III-V Semiconductor Crystals Using Submerged Heater Growth with Steady Magnetic and Electric Fields
(in collaboration with the U.S. Air Force Research Laboratory, Hanscom AFB, MA)

Future optoelectronic devices will require gallium-antimonide (GaSb) semiconductor crystals with low dislocation densities and homogeneous dopant or solute distributions. These semiconductors are being grown from the melt using the vertical gradient freezing (VGF) process by submerged heater growth (SHG). A combination of a steady magnetic field and a steady electric field is used to induce electromagnetic stirring in the melt. Electromagnetic stirring of the melt is needed in order to control the convection of species during growth in order to produce a crystal with a uniform composition. Analytical and numerical models are being developed in order to complement experiments being conducted at the U. S. Air Force Research Laboratory at Hanscom AFB.

Magnetically-Stabilized Liquid-Encapsulated Czochalski Growth of III-V Semiconductor Crystals
(in collaboration with the U.S. Air Force Research Laboratory, Hanscom AFB, MA)

Many optoelectronic devices require III-V semiconductor crystals, such as gallium-antimonide (GaSb) and indium-phosphide (InP), with small defect densities and uniform dopant compositions. These semiconductors can be grown from the melt by the liquid-encapsulated Czochralski (LEC) process. A steady (DC) magnetic field is needed to stabilize the melt motion and to eliminate turbulent temperature fluctuations. The application of a rotating magnetic field in addition to the steady magnetic field may produce better crystals. Analytical and numerical models are being developed to guide process optimization for growth with a steady magnetic field alone as well as for growth with both steady and rotating magnetic fields. The purpose of the modelling effort is to complement an experimental program being conducted at the U.S. Air Force Research Laboratory at Hanscom AFB.

Segregation Phenomena during Bridgman Growth of II-VI Alloyed Semiconductor Crystals in the Presence of Magnetic Fields
(in collaboration with the NASA Marshall Space Flight Center in Huntsville, AL)

During crystal growth of an alloy of two semiconductors, one compound is rejected into the melt, producing variations in the composition of the melt. Because one compound has a much larger density than the other, the compositional variations drive a buoyant convection which may lead to unacceptable non-uniformities in the crystal's composition. A strong magnetic field damps this convection, leading to much better crystals. Models are being developed for various processes, including Bridgman crystal growth, to predict crystal properties as functions of magnetic field strength and of other parameters. Predictions will be compared to experimental results obtained at the NASA Marshall Space Flight Center.